| Patent Employs
Modified TAB Technology to Produce CSPs |
|
By David
Francis and Linda Jardine, Contributing Editors
Patent Number: 5,990,546
Assignee: Nitto Denko Corporation
Inventors: Igarashi et al.
Title: Chip - Scale Package Type
of Semiconductor Device
|
 |
 |
This patent uses basic TAB technology that has
been modified to produce CSPs. In addition to using a continuous
process, this approach does not require the IC to be bumped.
Two prior art examples are discussed; the first
is a conventionally bonded TAB device which employs a large fanout
and requires an extensive PWB area.
The second example uses a ceramic substrate
to form a chip-scale package, but this approach is difficult to
automate.
TAB
Interconnect
Single-metal-layer TAB tape is etched to pattern
the copper layer, which can be bonded to the TAB film (a polymide)
using any of several methods.
The inner electrode hole on the topside of the
film (see illustration) is formed by mechanical or laser drilling
or by alkaline etching. The film properties that are important are
the ability to withstand both wire bond temperatures and alkali
etching if this method is used to form the via holes.
After etching, the topside via is formed by
plating Cu, Ni or Au up to the surface of the film. A bump is formed
on top of the via using wire bonding or plating methods. Wire bonding
can form balls of Au, Cu or solder. These wire bond bumps are fused
to the via columns. Bumps can also be formed by plating.
A layer of epoxy resin is applied over the conductor
pattern on the bottom side of the tape. Holes are formed where the
external bumps are to be located, and each of the holes is filled
with solder applied using a wire bonder and solder wire.
Chip
Attach
The unbumped chip is attached to the bumped
tape using a hot bar, pulsed heating or by employing single-point
bonding. Single-point bonding is preferably performed thermosonically
to lower the required bonding temperature.
Where solder is the bump material, standard
reflow techniques can be used, with the solder automatically correcting
for any misalignment.
 |
In an interesting variation, additional
holes are formed in the tape in a non-metallized region, and
corresponding bumps are formed on the IC. These dummy bumps
are for the sole purpose of aligning the chip to the TAB tape. |
The chip is sealed by transfer molding, potting
or a combination of methods. In one method, the space between the
chip and the TAB frame is filled with an epoxy resin while the back
area is filled with a silicone resin.
The key to having a high yield sealing process
is to ensure that the encapsulant forms a strong bond to the polyimide
film. This can be done by ion etching the film, immersing the film
in a hot solvent or alkaline solution and/or mechanically roughening
the surface.
To improve the heat dissipation capability of
the device, the back surface of the chip can be left exposed for
later attachment of a heat sink or a heat spreader can be bonded
to the die and then held in place with the seal resin. Additional
thermal bumps can be provided on the face of the chip to connect
to pads on the TAB frame. These pads are bumped to form thermal
vias to the PWB.
|
International
Interconnection Intelligence is a market and technology research
company specializing in the semiconductor packaging and interconnection
areas. Contact David Francis or Linda Jardine by e-mail at
iii1@ix.netcom.com or by phone at 650.728.5270. [iii1.com]
|
|